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TWO DEGREE OF FREEDOM PZT MEMS ACTUATED FLAPPING WINGS WITH INTEGRATED FORCE SENSING

机译：两层自由度PZT MEMS致动带综合力传感的扑翼翅膀

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J.S. Pulskamp; G.L. Smith; R.G. Polcawich; C. M; E.D. Wetzel;
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3. Design and Analysis of a Decoupled XY MEMS Microgripper with Integrated Dual-Axis Actuation and Force Sensing * * This work was supported in part by the Macao Science and Technology Development Fund under Grant 090/2015/A3 and 024/2014/A1 [J] . Sijie Yang, Qingsong Xu IFAC PapersOnLine . 2017,第1期

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TWO DEGREE OF FREEDOM PZT MEMS ACTUATED FLAPPING WINGS WITH INTEGRATED FORCE SENSING

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