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Modification of Interface Structure between Diamond-Like Carbon Thin Film and Silicon Substrate by RF Bias Sputtering and Analysis of Its Wear Resistance

机译：RF偏置溅射和耐磨性溅射硅基薄膜和硅衬底之间的界面结构的改变及其耐磨性

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Kenji NOSE; Yuya MORIHISA; Yuto SASAKI; Yoshitaka MITSUDA;
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年度 2010
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1. Influence of carbon sputtering power on structure, corrosion resistance, adhesion strength and wear resistance of platinum/rutheniumitrogen doped diamond-like carbon thin films [J] . Khun N.W., Liu E. Surface & Coatings Technology . 2010,第3期

机译：碳溅射功率对掺铂/钌/氮掺杂类金刚石碳薄膜结构，耐蚀性，附着强度和耐磨性的影响
2. Fabrication of high frequency ZnO thin film SAW devices on silicon substrate with a diamond-like carbon buffer layer using RF magnetron sputtering [J] . Shih WC, Huang RC Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2008,第3期

机译：使用射频磁控溅射在具有菱形碳缓冲层的硅基板上制备高频ZnO薄膜声表面波器件
3. Tribological Behavior of Nickel-Doped Diamond-Like Carbon Thin Films Prepared on Silicon Substrates via Magnetron Sputtering Deposition [J] . Khun N. W., Lee P. M., Toh W. Q., Tribology Transactions . 2016,第5期

机译：磁控溅射沉积在硅基底上制备的掺镍类金刚石碳薄膜的摩擦学行为
4. Low-temperature direct deposition of polycrystalline silicon thin film on glass substrate by RF magnetron sputtering with applied substrate bias [C] . Hashim S. B., Mahzan N. H., Herman S. H., 2012 IEEE Symposium on Humanities, Science and Engineering Research . 2012

机译：施加衬底偏置的RF磁控溅射在玻璃衬底上低温直接沉积多晶硅薄膜
5. The surface morphology of thin gold films deposited on silicon(001) substrates by sputter deposition. [D] . Ayoub, Sarah. 2012

机译：通过溅射沉积在硅（001）衬底上沉积的金薄膜的表面形态。
6. Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources [O] . Xingfang Liu, Guosheng Sun, Bin Liu, 2013

机译：固碳源的石墨烯-石墨碳纳米薄片模板在硅基底上生长六方柱状纳米晶结构的SiC薄膜
7. Friction and wear of diamond-like carbon thin films deposited via magnetron sputtering under different bias voltages [O] . Lam Xuan Bui 2015

机译：在不同偏置电压下通过磁控溅射沉积的菱形碳薄膜的摩擦和磨损

Modification of Interface Structure between Diamond-Like Carbon Thin Film and Silicon Substrate by RF Bias Sputtering and Analysis of Its Wear Resistance

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