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Development of a New Nonevaporable Getter Coating Using Oxygen-Free Palladium/Titanium, Surface Analysis by Synchrotron Radiation X-ray Photoelectron Spectroscopy, Residual Gas Analysis, and Evaluation of Pumping Speeds

机译：通过同步辐射X射线光电子光谱，残余气体分析和泵送速度的评估，通过同步钯/钛，表面分析的开发使用无氧钯/钛，表面分析，以及泵送速度的评估

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Tetsuya MIYAZAWA; Masashi KURIHARA; Shinya OHNO; Ayako HASHIMOTO; Yasuo NAKAYAMA; Kenichi OZAWA; Takashi KIKUCHI; Kazuhiko MASE;
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机译：使用同步辐射的X射线光电子能谱进行表面反应分析以及原位直接氮化工艺产生的AlN层的微观结构分析
2. Surface reaction analysis by X-ray photoelectron spectroscopy using synchrotron radiation and microstructure analysis of AlN layer produced by In-situ direct nitriding process [J] . Katsuyoshi Kondoh, Atsushi Kimura, Yoshinobu Takeda 粉体および粉末冶金 . 1999,第8期

机译：X射线光电子能谱使用同步辐射和原位直接氮化过程产生的ALN层的微观结构分析的表面反应分析
3. Topmost surface analysis by x-ray photoelectron spectroscopy using synchrotron radiation [J] . Atsushi Kimura, Makoto Katayama, Tomohiko Kanie, SEIテクニカルレビュ－ . 1998,第153期

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4. Transition from GaAs(001)(2x6)-S to (2x3)-S surfaces observed by synchrotron radiation photoelectron spectroscopy,X-ray absorption near edge structure,and X-ray standing waves [C] . Shiro Tsukamoto, Masahiko Shimoda, Munehiro Sugiyama, International symposium on compound semiconductors . 1999

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7. Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen [O] . Tetsuya Miyazawa, Yu Kano, Yasuo Nakayama, 2019

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机译：先进光子源同步辐射光束线材料清洗程序的X射线光电子能谱分析

Development of a New Nonevaporable Getter Coating Using Oxygen-Free Palladium/Titanium, Surface Analysis by Synchrotron Radiation X-ray Photoelectron Spectroscopy, Residual Gas Analysis, and Evaluation of Pumping Speeds

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