首页> 外文OA文献 >Properties of (Ti, Al) N films prepared by ion beam assisted deposition(Physics, Process, Instrument Measurements)

【2h】

Properties of (Ti, Al) N films prepared by ion beam assisted deposition(Physics, Process, Instrument Measurements)

机译：通过离子束辅助沉积制备的（Ti，Al）N膜的性质（物理，过程，仪器和测量）

页面导航

著录项
相似文献
相关主题

著录项

作者
SUZUKI Tsuneo; SETSUHARA Yuichi; MAKINO Yukio; MIYAKE Shoji; SAKATA Takao; MORI Hirotaro;
展开▼
作者单位

展开▼
年度 2013
总页数
原文格式 PDF
正文语种 eng
中图分类

相似文献

外文文献
中文文献
专利

1. Effect Of Temperature On Residual Stress And Mechanical Properties Of Ti Films Prepared By Both Ion Implantation And Ion Beam Assisted Deposition [J] . Yue He, Jizhong Zhang, Wenqing Yao, Applied Surface Science . 2009,第8期

机译：温度对离子注入和离子束辅助沉积钛膜残余应力和力学性能的影响
2. Properties and phase transition of (Ti,Al)N thin films prepared by ion beam-assisted deposition [J] . P. Budzynski, J. Sielanko, Z. Surowiec Intermetallics . 2008,第8期

机译：离子束辅助沉积制备（Ti，Al）N薄膜的性能和相变
3. Phase variation and properties of (Ti, Al)N films prepared by ion beam assisted deposition [J] . Setsuhara Y, Suzuki T, Makino Y, Surface & Coatings Technology . 1997,第1a3期

机译：离子束辅助沉积制备的（Ti，Al）N薄膜的相变和性能
4. Effect of Substrate Materials on Mechanical Properties and Microstructure of Carbon Nitride Films Prepared by Ion-beam-assisted deposition [C] . HIDENOBU OHTA, AKIHITO MATSUMURO, YUTAKA TAKAHASHI Materials Research Society Symposium . 2001

机译：基材材料对离子梁辅助沉积制备的碳氮化膜力学性能和微观结构的影响
5. The structure and mechanical properties of Al and Al-Al(2)O(3) microlaminate films synthesized by ion beam-assisted deposition. [D] . Kalnas, Christine Elaine. 1997

机译：通过离子束辅助沉积合成的Al和Al-Al（2）O（3）微层压膜的结构和力学性能。
6. Measurements of Microstructural Chemical Optical and Electrical Properties of Silicon-Oxygen-Nitrogen Films Prepared by Plasma-Enhanced Atomic Layer Deposition [O] . Hong-Ping Ma, Hong-Liang Lu, Jia-He Yang, 2018

机译：通过等离子体增强原子层沉积制备的硅氧氮薄膜的微结构化学光学和电学性质的测量
7. Optimization of (Al, Ti) N Thin Film Formation Process by Ion Beam Assisted Deposition(Physics, Processes, Instruments Measurements) [O] . TAKAHASHI Yasuo, LI Shuguang, IMAKITA Tomoyuki, 2013

机译：离子束辅助沉积优化（Al，Ti）N薄膜形成工艺（物理，工艺，仪器和测量）
8. Tribological behavior of silver films prepared on ceramic surfaces by ion-beam-assisted deposition. [R] . A. Erdemir R. A. Erck O. O. Ajayi J. H. Hsieh C. C. Cheng 1991

机译：离子束辅助沉积在陶瓷表面制备银膜的摩擦学行为。

Properties of (Ti, Al) N films prepared by ion beam assisted deposition(Physics, Process, Instrument Measurements)

著录项

相似文献

相关主题

期刊订阅