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Quantitative Strain Measurement in Semiconductor Devices by Scanning Moiré Fringe Imaging

机译：扫描莫尔条纹成像通过扫描半导体器件的定量应变测量

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Suhyun Kim; Sungho Lee; Younheum Jung; Joong Jung Kim; Gwangseon Byun; Sunyoung Lee; Heabum Lee;
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年度 2014
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1. Reproducible strain measurement in electronic devices by applying integer multiple to scanning grating in scanning moiré fringe imaging [J] . Suhyun Kim, Younheum Jung, Joong Jung Kim, AIP Advances . 2014,第10期

机译：通过在扫描莫尔条纹成像中对扫描光栅应用整数倍，可重现电子设备中的应变测量
2. Scanning moire fringe imaging for quantitative strain mapping in semiconductor devices [J] . Suhyun Kim, Sungho Lee, Yoshifumi Oshima, Applied Physics Letters . 2013,第16期

机译：扫描莫尔条纹成像，用于定量量化半导体器件中的应变
3. Direct observation of nanometer-scale strain field around CoSi2/Si interface using scanning moiré fringe imaging [J] . Kim Suhyun, Jung Younheum, Jung Kim Joong, Applied Physics Letters . 2014,第16期

机译：使用扫描莫尔条纹成像直接观察CoSi2 / Si界面周围的纳米级应变场
4. Enhanced Scanning Nonlinear Dielectric Microscopy with Stepwise dC/dV and dC/dz Imaging: Achieving Qualitative, Quantitative and Artifact-free Carrier Density Profiling of Semiconductor Devices [C] . T. Yamaoka, S. Hasumura, R. Hirose, International Symposium for Testing and Failure Analysis . 2018

机译：具有逐步DC / DV和DC / DZ成像的增强扫描非线性介电显微镜：实现半导体器件的定性，定量和无伪像载体密度分析
5. Microscopic studies of the fate of charges in organic semiconductors: Scanning Kelvin probe measurements of charge trapping, transport, and electric fields in p- and n-type devices [D] . Smieska, Louisa Marion 2015

机译：微观研究有机半导体中电荷的命运：扫描开尔文探针测量p型和n型器件中的电荷俘获，传输和电场
6. Underwater 3D Surface Measurement Using Fringe Projection Based Scanning Devices [O] . Christian Bräuer-Burchardt, Matthias Heinze, Ingo Schmidt, 2016

机译：使用基于条纹投影的扫描设备进行水下3D表面测量
7. Reproducible strain measurement in electronic devices by applying integer multiple to scanning grating in scanning moiré fringe imaging [O] . Suhyun Kim, Younheum Jung, Joong Jung Kim, 2014

机译：扫描云纹条纹成像中扫描光栅应用整数倍的电子器件可重复应变测量

Quantitative Strain Measurement in Semiconductor Devices by Scanning Moiré Fringe Imaging

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