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Modelling of Temperature and Flow Fields of RF Induction Plasma (I) : Preliminary Calculation for Low Temperature and High Flow Rate Case(Physics, Process, Instrument Measurement)

机译：射频感应等离子体的温度和流场建模（I）：低温和高流速情况的初步计算（物理，过程，仪器和测量）

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USHIO Masao; MATSUDA Fukuhisa; KAWANO Seishiro;
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年度 2013
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Modelling of Temperature and Flow Fields of RF Induction Plasma (I) : Preliminary Calculation for Low Temperature and High Flow Rate Case(Physics, Process, Instrument Measurement)

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