The optical properties of multilayer structures consisting of dielectric,udconductivity-oxide and nanoscaled metal layers, deposited on the planar substratesud(witness samples) and surface relief ones (diffraction gratings) with micro- and nanoscaleudsizes, are investigated by AFM, spectral ellipsometry (SE), and photometric techniques.udThe SE-measured parameters are related to actual characteristics of the layers whenudspecified the model of their near-surface regions. Using a parametrization of the layeruddielectric function versus the wavelength and a fitting procedure, the dielectricudparameters are determined. It is shown that the optical constants are affected by both theudsubstrate morphology and the adjacent medium. Preliminary data about the influence ofudisolated particle plasmon excitations in 2D-substrates with the top nanoscaled Au layerudon its optical properties are presented.
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