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Development, optimization and improvement of ZnSe crystal surfaces mechanical and chemical treatment and washing methods

机译:ZnSe晶体表面机械化学处理及清洗方法的开发,优化与改进

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摘要

The process of cutting, mechanical and chemical treatment of the undoped and doped ZnSe crystal surface has been studied. The chemical interaction of zinc selenide surface with bromine emerging solutions of H₂O₂ – HBr and H₂O₂ – HBr – organic solvent has been studied. The surface states after chemical etching have been investigated using electron, metallographic and atomic force microscopy, and it was shown that the surface state is improved after chemical etching. Etchant selection to develop slow polishing compositions for chemical-mechanical polishing of investigated materials has been made. Efficient methods for washing samples solutions have been developed after different types of ZnSe surface treatment: cutting of the crystal, mechanical surface treatment, chemical removing the surface damaged layer.
机译:研究了未掺杂和掺杂的ZnSe晶体表面的切割,机械和化学处理过程。研究了硒化锌表面与H 2 O 2-HBr和H 2 O 2-HBr-有机溶剂的溴溶出溶液之间的化学相互作用。使用电子显微镜,金相显微镜和原子力显微镜对化学蚀刻后的表面状态进行了研究,结果表明,化学蚀刻后的表面状态得到了改善。已经选择蚀刻剂以开发用于所研究材料的化学机械抛光的慢速抛光组合物。经过不同类型的ZnSe表面处理后,已经开发出了清洗样品溶液的有效方法:切割晶体,机械表面处理,化学去除表面受损层。

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