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The Effects of Precursor C2H2 Fraction on Microstructure and Properties of Amorphous Carbon Composite Films Containing Si and Ag Prepared by Magnetron Sputtering Deposition

机译：前体C2H2分数对磁控溅射沉积制备的含有Si和Ag的无定形碳复合膜微结构和性能的影响

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Xiaoqiang Liu; Junying Hao; Yongjun Lv; Xuejun Cui;
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1. Influence of deposition temperature and amorphous carbon on microstructure and oxidation resistance of magnetron sputtered nanocomposite Cr-C films [J] . Kristian Nygren, Matilda Andersson, Jonas Hoegstroem, Applied Surface Science . 2014,第juna30期

机译：沉积温度和非晶碳对磁控溅射纳米复合Cr-C薄膜结构和抗氧化性能的影响
2. Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering [J] . Yongjun Wang, Hongxuan Li, Li Ji, Surface & Coatings Technology . 2011,第8a9期

机译：非平衡磁控溅射制备的类石墨无定形碳膜的微观结构，力学和摩擦学性能
3. The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering [J] . Li H., Ji L., Zhao F., Journal of Physics, D. Applied Physics: A Europhysics Journal . 2010,第50期

机译：占空比对不平衡磁控溅射制备的类石墨无定形碳膜组织和性能的影响
4. Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering [C] . C. Specht, J. Schroeder, R. Wittorf, Trends and new applications of thin films . 1998

机译：直流磁控溅射制备含金属非晶碳膜（Me-C：H）的沉积与表征
5. Structure, mechanical and tribological properties of carbon nitride-based superlattice and titanium diboride-based composite films synthesized by magnetron sputtering. [D] . Wu, Mei-Ling. 1999

机译：磁控溅射合成氮化碳基超晶格和二硼化钛基复合膜的结构，力学和摩擦学性能。
6. The Effects of Precursor C2H2 Fraction on Microstructure and Properties of Amorphous Carbon Composite Films Containing Si and Ag Prepared by Magnetron Sputtering Deposition [O] . Xiaoqiang Liu, Junying Hao, Yongjun Lv, 2019

机译：前驱体C2H2分数对磁控溅射沉积制备的含Si和Ag的非晶碳复合膜的组织和性能的影响
7. Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C:H Films Prepared through Magnetron Sputtering Deposition [O] . Xiaoqiang Liu, Junying Hao, Hu Yang, 2015

机译：基质温度效应通过磁控溅射沉积制备的（Si，Al）/ A-C：H膜的微观结构和性质

The Effects of Precursor C2H2 Fraction on Microstructure and Properties of Amorphous Carbon Composite Films Containing Si and Ag Prepared by Magnetron Sputtering Deposition

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