The systems “thin Ni film – lithium niobate” and “thin Pd film – lithiumudtantalate” are implanted by Ar⁺ ions with an energy of 100 keV and a dose of 10¹⁶ cm⁻².udAnalyses of the systems by AFM and SEM have shown that the ion implantationudessentially modifies the near-surface structure resulting in a change of its optical,udelectrical, and mechanical properties. Strong difference in the near-surface structuresudbetween implanted systems with Ni or Pd thin films is observed. Such a difference isudexplained by the heterogeneity of an ion beam and different properties of the materials.udThe application to the development of high-sensitive pyroelectric detectors with highuddamage threshold is proposed.
展开▼
