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Deposition and Characterization of Antistiction Layer for Nanoimprint Lithography by VSAM (Vapor Self Assembly Monolayer)

机译：VSAM纳米压印光刻抗突层的沉积和表征（蒸汽自组装单层）

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Nam-Goo Cha; Kyu-Chae Kim; Jin-Goo Park; Jun-Ho Jung; Eung-Sug Lee; Neung-Goo Yoon;
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年度 2007
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1. Control of micro- and nanopatterns of octadecyltrimethoxysilane monolayers using nanoimprint lithography and atmospheric chemical vapor deposition [J] . Laurence Ressier, Christel Martin, Benoit Viallet, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2007,第1期

机译：使用纳米压印光刻和大气化学气相沉积法控制十八烷基三甲氧基硅烷单层的微米和纳米图案
2. Vapor-Phase Self-Assembled Monolayer for Improved Mold Release in Nanoimprint Lithography [J] . Gun-Young Jung, Zhiyong Li, Wei Wu Langmuir: The ACS Journal of Surfaces and Colloids . 2005,第4期

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3. Fabrication of Au nanorod and nanogap split-ring structures by reactive-monolayer-assisted thermal nanoimprint lithography involving electrodeposition [J] . Tomioka Tatsuya, Kubo Shoichi, Nagase Koichi, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures . 2012,第6期

机译：含电沉积的反应性单层辅助热纳米压印光刻技术制备金纳米棒和纳米间隙裂环结构
4. Vapor Deposited Release Layers for Nanoimprint Lithography [C] . Tong Zhang, Boris Kobrin, Mike Wanebo, Emerging Lithographic Technologies X pt.1 . 2006

机译：纳米压印光刻的气相沉积释放层
5. Vapor phase deposition of self-assembled monolayers as a resist for area selective atomic layer deposition. [D] . Hong, Junsic. 2006

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6. Controllable Growth of the Graphene from Millimeter-Sized Monolayer to Multilayer on Cu by Chemical Vapor Deposition [O] . Jinyang Liu, Zhigao Huang, Fachun Lai, 2015

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7. Reactive-monolayer-assisted Thermal Nanoimprint Lithography [O] . Shoichi Kubo, Masaru Nakagawa 2012

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8. Interactions Between Organized, Surface-Confined Monolayers and Vapor-Phase ProbeMolecules. 7. Comparison of Self-Assemblying Organomercaptan Monolayers Deposited on Gold from Liquid and Vapor Phases [R] . Chailapakul, O., Sun, L., Xu, C., 1993

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Deposition and Characterization of Antistiction Layer for Nanoimprint Lithography by VSAM (Vapor Self Assembly Monolayer)

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