Compact-sized excimer laser with two-side preionization

摘要

Compact-sized monopulse excimer laser with the foot-print equal to onlyud 250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Outputud energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2ud pulses per second, beam divergence – 8 milliradians. The small foot-print, small axisud height of beam in combination with low weight of laser (5 kg) allow this laser to be usedud in various optical schemes, where traditional, typical bulky ecximer lasers areud unapplicable. Moreover, small dimensions, low weight in combination with low energyud consumption (a few watts) allow them to be used in clear “field” conditions. Besideud abovementioned characteristics, the designed laser differs from the traditional ones byud two-side preionization that has a “spark” character near the “hot” massive electrode andud the so-called “capacitive” or “barrier” one under the ground grid. This two-sideud preionization provides both igniting and sustaining of wider discharge thus allowing toud reach beam with higher symmetry – its cross-section is 15×20 mm².