Erosion behavior of tungsten coatings in magnetron type discharges with hot cathode

摘要

The investigations of erosion behavior of vacuum-arc deposited and chemical vapor deposited W-coatings were carried out under steady state plasma impact in magnetron type discharges of cylindrical configuration. For comparison the erosion characteristics were measured for dense bulk tungsten, too. It was shown that erosion rate values both for vacuum-arc deposited and chemical vapor deposited W-coatings are near to that for dense bulk tungsten. The measured erosion rate dependence on atomic number is in good agreement with the data calculated from the equation for mass dependence of physical ion sputtering.