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In-Situ Monitoring of Film Quality during Polyclystalline Diamond Film Growth in Hot filament-Assisted CVD

机译：在热丝辅助CVD中聚晶金刚石薄膜生长期间对薄膜质量的原位监测

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Yukio Akiba; Yoichi Hirose; Tateki Kurosu; Masamori Iida;
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年度 1997
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1. In-Situ Monitoring of Film quality during Polyclystalline Diamond Film Growth in Hot filament-Assisted CVD [J] . Yukio Akiba, Yoichi Hirose, Tateki Kurosu 電気学会論文誌. A . 1997,第3期

机译：热丝辅助CVD中多晶金刚石膜生长过程中的膜质量原位监测
2. Growth and characterization of diamond particles, diamond films, and CNT-diamond composite films deposited simultaneously by hot filament CVD [J] . C. R. Kumaran, Maneesh Chandran, M. Krishna Surendra, Journal of Materials Science . 2015,第1期

机译：通过热丝CVD同时沉积的金刚石颗粒，金刚石膜和CNT-金刚石复合膜的生长和表征
3. Growth and characterization of diamond particles, diamond films, and CNT-diamond composite films deposited simultaneously by hot filament CVD [J] . Kumaran C. R., Chandran Maneesh, Surendra M. Krishna, Journal of Materials Science . 2015,第1期

机译：通过热丝CVD同时沉积的金刚石颗粒，金刚石膜和CNT-金刚石复合膜的生长和表征
4. Polishing of filament-assisted CVD diamond films [C] . Carolyn F. Hickey, Thomas P. Thorpe, Arthur A. Morrish, Diamond optics conferenc . 1991

机译：光丝辅助CVD金刚石薄膜抛光
5. In-situ and post-growth investigation of low temperature Group III-nitride thin films deposited via MOCVD. [D] . Johnson, Michael Christopher. 2001

机译：通过MOCVD沉积的低温III族氮化物薄膜的原位和生长后研究。
6. Deposition of Diamond Films in a Closed Hot Filament CVD System [O] . Guan-Ren Lai, E. N. Farabaugh, A. Feldman, 1995

机译：封闭热丝CVD系统中金刚石膜的沉积
7. Special Issue/Deposition Methods, Characterizations and Applications of Diamond Films. Growth of Diamond Thin Films Formed by Hot Filament CVD and Electron Assisted CVD. [O] . Atsuhito SAWABE 1991

机译：钻石电影的特殊问题/沉积方法，表征和应用。通过热长丝CVD和电子辅助CVD形成的金刚石薄膜的生长。

In-Situ Monitoring of Film Quality during Polyclystalline Diamond Film Growth in Hot filament-Assisted CVD

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