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Comparative evaluation of protective coatings and focused ion beam chemical vapor deposition processes

机译：保护涂层和聚焦离子束化学气相沉积工艺的比较评价

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B. W. Kempshall; L. A. Giannuzzi; B. I. Prenitzer; F. A. Stevie; S. X. Da;
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年度 2002
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Comparative evaluation of protective coatings and focused ion beam chemical vapor deposition processes

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