Efficiency of the nitriding process in glow discharge plasma

摘要

The problem of determination of the content of atomic nitrogen in glow discharge plasma in a nitrogen-argonudmixture is considered. The discharge in this mixture is widely applied in the technologies of metal`s surfacesudmodification and the atomic nitrogen is responsible for the efficiency of this technologies. Influence of mixtureudcomposition on the rate constant of dissociation of molecular nitrogen, accountable for producing of atomic nitrogen isuddetermined by simulation way, and parameters of plasma – from an experiment, on the basis of measuring by doubleudprobes. A function of distribution of electrons on energies was founded by numerically integrating the Boltzmannudequation. The last one was written in the binomial approaching for mixture of molecular nitrogen and argon. Theuddifferences between proposed and fluid models are briefly discussed.