Recently suggested single-ion-beam setup for ion-beam assisted deposition (IBAD) of layers withudvarious composition including the sputter target in a form of hollow truncated cone made of theudmaterial to be deposited allows the use of a single ion beam (e.g., noble gas) for simultaneous layeruddeposition and ion-beam mixing. Such a setup can also be applied for coating deposition on theudsurfaces having sophisticated geometric shape. In the present work single-beam IBAD was used foruddeposition of Ni and Mo coatings onto the surface of ball fingers. The Rutherford backscattering wasudused for evaluating the coating thickness distributions along the spherical surface of the aluminiumudball fingers. It is shown that the results can be explained in terms of space distribution of the sputteredudatoms inside the conical target.
展开▼
