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Local hydrogen recycling impact on operation of rod plasma injectors

机译:局部氢气回收对棒式等离子喷射器运行的影响

摘要

The strong influence of hydrogen recycling on the IONOTRON-046 plasma injector operation was found. The transitions were even observed from deposition by pulsed erosion (DPE) regime of the IONOTRON operation, which characterized by strong electrode erosion into pulse implantation doping (PID) regime with low electrode erosion. Physical mechanisms of such behavior are considered using the results of measurements of an outgassing rate from the titanium electrode rods used in IONOTRON-046 by means of mass spectrometry and thermal desorption methods, measurements of current- and voltage-waveforms, and spectroscopic studies of plasma emission. A possible practical use of the observed effects is also discussed.
机译:发现氢循环对IONOTRON-046等离子注射器的运行有很大影响。甚至可以从IONOTRON操作的脉冲腐蚀(DPE)方案从沉积中观察到过渡,该现象的特征在于强电极腐蚀到低电极腐蚀的脉冲注入掺杂(PID)方案。通过质谱和热脱附方法,IONOTRON-046中使用的钛电极棒的放气速率测量结果,电流和电压波形测量结果以及等离子光谱研究结果,来考虑这种行为的物理机制发射。还讨论了观察到的效果的可能的实际使用。

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