Investigation of helium plasma stream parameters in experiments on surface modification

摘要

Processing of different constructional materials with pulsed plasma streams is one of prospective methods of surface modification. The main objection of this study is adjustment of plasma treatment regimes for different materials that allows achieving optimal thickness of modified layer with simultaneously minimal value of surface roughness. With use of optical spectroscopy, detailed information about the basic plasma parameters – electron density, electron and ion temperatures, plasma stream duration and velocity, was obtained. Integrated spectra of plasma radiation were analyzed. The majority of helium and impurity spectral lines were investigated on a subject of Stark broadening. Plasma pressure and energy density values measured with piezodetectors and calorimeters are in good agreement with plasma parameters obtained by optical techniques.