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Homogenizing and Applying Dielectric Film to Wafer-Level Film Preparation

机译：均匀化和施加介电膜到晶圆级膜制剂

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Kazutaka Sueshige; Keita Iimura; Masaaki Ichiki; Tadatomo Suga; Toshihiro Itoh;
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年度 2012
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5. Preparation and characterization of barium titanate dielectric thin/thick films for MLCC applications. [D] . Zhang, Jianping. 2000

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8. Supercritical Carbon Dioxide Extraction of Porogens for the Preparation of Ultralow Dielectric Constant Films [R] . Rajagopalan, T., Sun, J., Lahlouh, B., 2003

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Homogenizing and Applying Dielectric Film to Wafer-Level Film Preparation

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