LASER-INDUCED DECOMPOSITION OF METAL CARBONYLS FOR CHEMICAL VAPOR DEPOSITION OF MICROSTRUCTURES

摘要

Tungsten and nickel carbonyls were used to produce metal microstructures by laser-induced chemical vapor deposition (CVD) on various substrates. The deposition rate of microstructures produced by thermodecomposition of W(CO)6 on Si substrates heated with a cw Ar+ laser beam was relatively low (10 to 30 nm/s) even at high temperatures (above 900°C). Ni microstructures were deposited on quartz substrates irradiated with a CO2 laser beam. Relatively high laser powers were needed to heat the Ni surface up to 400°C due to the high reflectivity of the metal at 10.59 µm. The Ar+ laser-induced CVD of Ni dots on Si substrates was accomplished with relatively low laser powers ; the deposition rate was several µm/s at low temperatures (200°-400°C). Visible and infrared laser-induced CVD of Ni microstructures was demonstrated to occur via a purely thermal decomposition of Ni(CO)4. The deposition kinetics was limited by the desorption of CO molecules from the Ni surface.