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ELIMINATION OF DISLOCATIONS IN GaAs SINGLE CRYSTALS

机译:消除GaAs单晶中的脱位

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摘要

Large size semiconductor crystals are being requested in several device-oriented technologies. These crystals exhibit various defects (point and extended defects). Indeed, it is well-known in the case of GaAs that the presence of dislocations strongly decreases the life-time of Ga1-xAlxAs/ GaAs lasers. Moreover, it appears now, that the dislocations have a detrimental effect on GaAs integrated circuits. Their presence in LEC (Liquid Encapsulated Czochralski) crystals are mainly due to the thermal stresses occurring during the growth. We present in this paper some experimental results showing that it is possible to strongly reduce (by a factor 10, at least) the dislocation density either by decreasing the thermal stresses level (Liquid Encapsulated Kyropoulos Technique) or by adding an isoelectronic impurity (indium to the melt).
机译:在多种设备的技术中要求大尺寸半导体晶体。这些晶体表现出各种缺陷(点和延长的缺陷)。实际上,在GaAs的情况下,脱位的存在强烈地降低了Ga1-Xalxas / GaAs激光器的寿命的众所周知。此外,现在出现,脱位对GaAs集成电路具有不利影响。它们在LEC(液体包封的Czochralski)晶体中的存在主要是由于在生长过程中发生的热应力。我们在本文中存在一些实验结果表明,通过降低热应力水平(液体封装的kyropoulos技术)或通过添加异形杂质(铟至indium),可以强烈地减少(通过10,至少)脱位密度。熔体)。

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