Ba ferrite films with non-stoichiometric composition were deposited using Facing Targets Sputtering apparatus. The films with well c-axis orientation and remarkable perpendicular anisotropy were attained even at the substrate temperature below 600°C. Sufficiently large saturation magnetization 4πM, of 3.7 kG and small crystallite size below 20 nm were attained using the targets with Fe-excessive composition. Their good crystallographic and magnetic characteristics were thought to be satisfactory for high density magnetic recording media.
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