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Measuring the Blind Holes: Three-Dimensional Imaging of through Silicon via Using High Aspect Ratio AFM Probe

机译：测量盲孔：通过使用高纵横比AFM探针通过硅的三维成像

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Imtisal Akhtar; Malik Abdul Rehman; Yongho Seo;
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1. Proposal for new atomic force microscopy (AFM) imaging for a high aspect structure (digital probing mode AFM)m [J] . Sumio Hosaka, Takafumi Morimoto, Kouji Kuroda Microelectronic Engineering . 2001,第期

机译：针对高纵横比结构的新原子力显微镜（AFM）成像的建议（数字探测模式AFM）m
2. A method of calibration of a seven-hole pressure probe for measuring highly three-dimensional flows [J] . C Venkateswara Babu, M Govardhan, N Sitaram Measurement Science & Technology . 1998,第1a3期

机译：用于测量高三维流量的七孔压力探头的校准方法
3. Eliminating dependence of hole depth on aspect ratio by forming ammonium bromide during plasma etching of deep holes in silicon nitride and silicon dioxide [J] . Iwase Taku, Yokogawa Kenetsu, Mori Masahito Japanese journal of applied physics . 2018,第6S2期

机译：通过在氮化硅和二氧化硅的深孔进行等离子刻蚀过程中形成溴化铵，消除了孔深对长宽比的依赖性
4. Fabrication of novel AFM probe with high-aspect-ratio ultra-sharp three-face silicon nitride tips [C] . Vermeer R., Berenschot E., Sarajlic E., IEEE International Conference on Nanotechnology . 2014

机译：具有高纵横比的超锐度三面氮化硅探针的新型AFM探针的制造
5. Femtosecond nonlinear spectroscopy at surfaces: Second-harmonic probing of hole burning at the silicon(111)7 x 7 surface and Fourier-transform sum-frequency vibrational spectroscopy [D] . McGuire, John Andrew 2004

机译：Femtosecond非线性光谱在表面下：硅（111）7×7表面和傅里叶变换和频率振动光谱燃烧的孔燃烧的第二谐波探测
6. Advanced Surface Probing Using a Dual-Mode NSOM–AFM Silicon-Based Photosensor [O] . Matityahu Karelits, Emanuel Lozitsky, Avraham Chelly, 2019

机译：使用双模NSOM–AFM硅基光电传感器进行高级表面探测
7. The black silicon method IV: the fabrication of three-dimensional structures in silicon with high aspect ratios for scanning probe microscopy and other applications [O] . Jansen, Henricus V., de Boer, Meint J., Boer, M.A., 1995

机译：黑硅方法IV：以高纵横比在硅中制造三维结构，用于扫描探针显微镜和其他应用
8. Calibration and Measuring Procedure of a Five-Hole Hemispherical Head Probe in Compressible Flow [R] . Houtman, E. M., Bannink, W. J. 1989

机译：可压缩流动中五孔半球形探头的校准和测量程序

Measuring the Blind Holes: Three-Dimensional Imaging of through Silicon via Using High Aspect Ratio AFM Probe

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