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Plasmacatalytic removal of O 2 traces in H 2 ‐enriched process gases with a coaxial packed‐bed DBD reactor

机译：在H 2-ocriChed工艺气体中除去o 2痕迹的o 2痕迹用同轴包装床DBD反应器

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T. Nitsche; M. Budt; W. Althaus;
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2. Removal of NF/sub 3/ from semiconductor-process flue gases by tandem packed-bed plasma and adsorbent hybrid systems [J] . Jen-Shih Chang, Kostov K.G. IEEE Transactions on Industry Applications . 2000,第5期

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5. Sorptive trace-element removal in alumina packed beds. [D] . Prasad, Amresh. 2001

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8. Dry-Packed Beds for the Removal of Strong-Acid Gases from Recycled Atmospheres [R] . Gadomski, S. T. 1966

机译：干燥填充床，用于从回收的大气中去除强酸性气体

Plasmacatalytic removal of O 2 traces in H 2 ‐enriched process gases with a coaxial packed‐bed DBD reactor

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