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Electrical properties of rapid thermally annealed SiNx:H/Si structures characterized by capacitance-voltage and surface photovoltage spectroscopy

机译：快速热退火的SINX的电性能：H / SI结构，其特征在于电容 - 电压和表面光电谱

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F L Martínez; A del Prado; I Mártil; G González-Díaz; K Kliefoth; W Füssel;
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年度 2001
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Electrical properties of rapid thermally annealed SiNx:H/Si structures characterized by capacitance-voltage and surface photovoltage spectroscopy

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