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The Influence of Crystal Orientation on Subsurface Damage of Mono-Crystalline Silicon by Bound-Abrasive Grinding

机译：叠层研磨晶体取向对单晶硅地下损伤的影响

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Wei Yang; Yaguo Li;
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年度 2021
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The Influence of Crystal Orientation on Subsurface Damage of Mono-Crystalline Silicon by Bound-Abrasive Grinding

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