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SYNTHESIS OF LITHIUM AND COBALT OXIDES SYSTEMS BY THE ALD METHOD TO OBTAIN LITHIUM COBALT OXIDE CATHODE FOR THIN-FILM LIBS

机译：通过ALD法合成锂和钴氧化物系统，得到薄膜Libs的锂钴氧化物阴极

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Maxim MAXIMOV; Ilya MITROFANOV; Ilya EZHOV; Yury KOSHTYAL; Denis NAZAROV; Artem KIM; Aleksander RUMYANTSEV; Anatoly POPOVICH;
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SYNTHESIS OF LITHIUM AND COBALT OXIDES SYSTEMS BY THE ALD METHOD TO OBTAIN LITHIUM COBALT OXIDE CATHODE FOR THIN-FILM LIBS

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