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Sub‐Micrometer Zeolite Films on Gold‐Coated Silicon Wafers with Single‐Crystal‐Like Dielectric Constant and Elastic Modulus

机译：镀金硅晶片上的亚微米沸石薄膜，具有单晶硅晶片介质恒定和弹性模量

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Raffaele Tiriolo; Neel Rangnekar; Han Zhang; Meera Shete; Peng Bai; John Nelson; Evguenia Karapetrova; Christopher W. Macosko; Joern Ilja Siepmann; Ernesto Lamanna; Angelo Lavano; Michael Tsapatsis;
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1. Sub-Micrometer Zeolite Films on Gold-Coated Silicon Wafers with Single-Crystal-Like Dielectric Constant and Elastic Modulus [J] . Tiriolo Raffaele, Rangnekar Neel, Zhang Han, Advanced Functional Materials . 2017,第25期

机译：具有单晶介电常数和弹性模量的镀金硅晶片上的亚微米沸石膜
2. Young's Modulus Enhancement of Mesoporous Pure-Silica-Zeolite Low-Dielectric-Constant Films by Ultraviolet and Silylation Treatments [J] . Takenobu Yoshino, Nobuyoshi Ohnuki, Nobuhiro Hata, Japanese journal of applied physics . 2009,第5issue1期

机译：紫外线和硅烷化处理提高中孔纯硅沸石低介电常数薄膜的杨氏模量
3. Theoretical Investigation of Dielectric Constant and Elastic Modulus of Three-Dimensional Isotropic Porous Silica Films with Cubic and Disordered Pore Arrangements [J] . Hidenori Miyoshi, Kazuhiro Yamada, Kazuo Kohmura, Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2005,第8期

机译：具有立方和无序孔排列的三维各向同性多孔二氧化硅薄膜的介电常数和弹性模量的理论研究
4. Maximizing helium-neon laser optical absorption with micromachined single-crystal silicon wafer surfaces coated with antireflective thin films [C] . Kolesar, E.S., Uyehata, . 1992

机译：涂有抗反射薄膜的微加工单晶硅晶片表面使氦氖激光的光吸收最大化
5. Elastic modulus study of gold thin film for use as an actuated membrane in a superconductive radio frequency (RF) microelectromechanical (MEM) switch [D] . Bogozi, Albert 2005

机译：在超导射频（RF）微机电（MEM）开关中用作致动膜的金薄膜的弹性模量研究
6. Complete set of elastic dielectric and piezoelectric constants of 011C poled rhombohedral Pb(In0.5Nb0.5)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3:Mn single crystals [O] . Xiaoqing Huo, Shujun Zhang, Gang Liu, -1

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7. Characterization of Sol-Gel-Derived and Crystallized HfO2, ZrO2, ZrO2-Y2O3 Thin Films on Si(001) Wafers with High Dielectric Constant [O] . Hirofumi Shimizu, Toshikazu Nishide 2012

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8. Process for the homoepitaxial growth of single-crystal silicon carbide films on silicon carbide wafers [R] . 1993

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Sub‐Micrometer Zeolite Films on Gold‐Coated Silicon Wafers with Single‐Crystal‐Like Dielectric Constant and Elastic Modulus

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