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Implementation of High Carrier Mobility in Al-N Codoped p-Type ZnO Thin Films Fabricated by Direct Current Magnetron Sputtering with ZnO:Al2O3Ceramic Target

机译：通过用ZnO：Al2O3溅射的直流磁控溅射制造的Al-N编码P型ZnO薄膜中的高载流性迁移率

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Hujie Jin; Bing Xu; Choon-Bae Park;
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年度 2011
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1. Implementation of High Carrier Mobility in Al-N Codoped p-Type ZnO Thin Films Fabricated by Direct Current Magnetron Sputtering with ZnO:Al₂O₃ Ceramic Target [J] . Jin Hujie, Xu Bing, Park Choon-Bae Transactions on Electrical and Electronic Materials . 2011,第4期

机译：直流磁控溅射ZnO：Al _{2 O _{3 陶瓷靶材制备Al-N共掺杂p型ZnO薄膜中高载流子迁移率的实现}}
2. Synthesis of p-type Al-N codoped ZnO films using N_2O as a reactive gas by RF magnetron sputtering [J] . Shih-Min Chou, Min-Hsiung Hon, Ing-Chi Leu Applied Surface Science . 2008,第5p2期

机译：N_2O作为反应气体通过射频磁控溅射合成p型Al-N共掺杂ZnO薄膜
3. Carrier mobility of highly transparent conductive Al-doped ZnO polycrystal line films deposited by radio-frequency, direct-current, and radio-frequency-superimposed direct-current magnetron sputtering: Grain boundary effect and scattering in the grain bulk [J] . Junichi Nomoto, Hisao Makino, Tetsuya Yamamoto Journal of Applied Physics . 2015,第4期

机译：射频，直流和射频叠加直流磁控溅射沉积的高透明导电Al掺杂ZnO多晶线膜的载流子迁移率：晶界效应和晶粒体积中的散射
4. The Study of Al-N Codoped ZnO Thin Films Prepared by DC Magnetron Sputtering [C] . H. Abdul Hamid, M. N. Abdul Hadi International Conference on Advanced Material Engineering and Technology . 2015

机译：通过DC磁控溅射制备的Al-N代码ZnO薄膜的研究
5. Manufacturing gallium doped ZNO thin films suitable for use in thin film transistors using unbalanced magnetron sputtering. [D] . Jones, Timothy R. 2013

机译：使用不平衡磁控溅射制造适用于薄膜晶体管的掺镓ZNO薄膜。
6. Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency Direct-Current and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering [O] . Junichi Nomoto, Katsuhiko Inaba, Shintaro Kobayashi, 2017

机译：射频直流和射频叠加直流磁控溅射沉积的透明导电掺铝ZnO多晶薄膜的载流子输运和晶体学取向特征
7. Analysis of Photoluminescence for N-doped and undoped p-type ZnO Thin Films Fabricated by RF Magnetron Sputtering Method [O] . Yan-Yan Liu, Hu-Jie Jin, Choon-Bae Park, 2009

机译：采用RF磁控溅射法制造的N掺杂和未掺杂的P型ZnO薄膜的光致发光分析

Implementation of High Carrier Mobility in Al-N Codoped p-Type ZnO Thin Films Fabricated by Direct Current Magnetron Sputtering with ZnO:Al2O3Ceramic Target

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