Synthesis of Large-Area Single-Layer Graphene Using Refined Cooking Palm Oil on Copper Substrate by Spray Injector-Assisted CVD

摘要

Abstract We present a synthesis of large-area single-layer graphene on copper substrate using a refined cooking palm oil, a natural single carbon source, by a home-made spray injector-assisted chemical vapor deposition system. The effects of the distance between spray nozzle and substrate, and growth temperature are studied. From Raman mapping analysis, shorter distance of 1 cm and temperature of around 950 °C lead to the growth of large-area single-layer graphene with a coverage up to 97% of the measured area size of 6400 μm2. The crystallinity of the grown single layer graphene is relatively good due to high distribution percentage of FWHM values of 2D band that is below 30 cm−1. However, the defect concentration is relatively high, and it suggests that a flash-cooling technique needs to be introduced.