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Fabrication and characteristics of ZnO thin films deposited by RF sputtering on plastic substrates for flexible display

机译：RF溅射沉积的ZnO薄膜对柔性显示器的ZnO薄膜的制造和特性

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DeDong Han; Yi Wang; ShengDong Zhang; Lei Sun; RuQi Han; Satoru Matsumoto; Yuji Ino;
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年度 2011
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1. Nanocrystalline ZnO Thin Film Deposition on Flexible Substrate by Low-Temperature Sputtering Process for Plastic Displays [J] . Arghya Narayan Banerjee, Sang Woo Joo, Bong-Ki Min Journal of nanoscience and nanotechnology . 2014,第10期

机译：低温溅射工艺在柔性显示器上纳米晶ZnO薄膜的沉积
2. Characteristics of ZnO Films Deposited on Plastic Substrates at Various RF Sputtering Powers [J] . J. J. KIM, J. H. LEE, J. Y. LEE, Journal of the Korean Physical Society . 2009,第5aPta1期

机译：各种射频溅射功率下沉积在塑料基板上的ZnO薄膜的特性
3. The effect of thickness on the physico-chemical properties of nanostructured ZnO:Al TCO thin films deposited on flexible PEN substrates by RF-magnetron sputtering from a nanopowder target [J] . Hamrit S., Djessas K., Brihi N., CERAMICS INTERNATIONAL . 2016,第14期

机译：从纳米摩尔靶通过RF-磁控溅射沉积在柔软的笔基板上的纳米结构ZnO：Al TCO薄膜的物理化学性质的影响
4. Substrate temperature dependence of nanoparticle ZnO thin films deposited on flexible substrates by RF magnetron sputtering [C] . Sauki Nur Saradah Muhamad, Herman Sukreen Hana, Mahmood Mohamad Rusop 2012 International Conference on Enabling Science and Nanotechnology . 2012

机译：射频磁控溅射沉积在柔性基板上的纳米ZnO薄膜的基板温度依赖性
5. Characterization of Indium Zinc Oxide, Indium Tin Oxide, and Molybdenum Thin Films on Flexible Glass Substrates Deposited via Roll-to-roll Sputter Deposition Processes [D] . Bezama, Christian. 2019

机译：通过轧制溅射沉积工艺沉积在柔性玻璃基板上的氧化铟锌，氧化铟锡和钼薄膜的表征
6. Effect of Target Composition and Sputtering Deposition Parameters on the Functional Properties of Nitrogenized Ag-Permalloy Flexible Thin Films Deposited on Polymer Substrates [O] . Waheed Khan, Qun Wang, Xin Jin 2018

机译：靶成分和溅射沉积参数对沉积在聚合物基底上的氮化银-坡莫合金柔性薄膜功能性能的影响
7. Effects of Sputter Pressure on the Properties of Sputtered ZnO:Al Films Deposited on Plastic Substrate [O] . 2009

机译：溅射压力对塑料基质溅射ZnO：Al膜性能的影响
8. Direct Fabrication of a-Si:H Thin Film Transistor Arrays on Plastic and Metal Foils for Flexible Displays [R] . O'Rourke, S. M., Loy, D. E., Moyer, C., 2008

机译：在柔性显示器的塑料和金属箔上直接制造a-si：H薄膜晶体管阵列

Fabrication and characteristics of ZnO thin films deposited by RF sputtering on plastic substrates for flexible display

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