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Temperature effect on structural, mechanical properties and corrosion behaviour of CrN thin films deposited by magnetron sputtering

机译：磁控溅射沉积CRN薄膜结构，力学性能和腐蚀行为的温度效应

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Bassam Abdallah; Mahmoud Kakhia; Walied Alssadat; Walaa Zetoun;
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1. Effect of target composition on the microstructural, mechanical, and corrosion properties of TiAlN thin films deposited by high-power impulse magnetron sputtering (Reprinted from Surface & Coatings Technology, vol 352, pg 330-337, 2018) [J] . Chang Chi-Lung, Yang Fu-Chi Surface & Coatings Technology . 2019,第期

机译：靶组合物对高功率脉冲磁控溅射沉积的TiAln薄膜微结构，机械和腐蚀性能的影响（从表面涂层技术，Vol 352，PG 330-337,2018）
2. Effect of target composition on the microstructural, mechanical, and corrosion properties of TiAlN thin films deposited by high-power impulse magnetron sputtering [J] . Chang Chi-Lung, Yang Fu-Chi Surface & Coatings Technology . 2018,第期

机译：靶组合物对高功率脉冲磁控溅射沉积的TiAln薄膜微结构，机械和腐蚀性能的影响
3. Structural, morphological and mechanical hardness properties of titanium nitride thin films deposited by DC magnetron sputtering: Effect of substrate temperature [J] . Hosseinnejad M. T., Ettehadi-Abari M., Panahi N., Journal of optoelectronics and advanced materials . 2017,第5a6期

机译：DC磁控溅射沉积的氮化钛薄膜的结构，形态学和机械硬度特性：基材温度的影响
4. Effect of Film Thickness on Structural and Mechanical Properties of AlCrN Nanocompoite Thin Films Deposited by Reactive DC Magnetron Sputtering. [C] . Ravi Prakash, Davinder Kaur International Conference on Condensed Matter and Applied Physics . 2016

机译：膜厚度对反应性DC磁控溅射沉积的Alcrn纳米组合薄膜结构和力学性能的影响。
5. Aluminium nitride piezoelectric thin films reactively deposited in closed field unbalanced magnetron sputtering for elevated temperature 'smart' tribological applications. [D] . Hasheminiasari, Masood. 2013

机译：在高温“智能”摩擦应用中，在封闭场不平衡磁控溅射中反应性沉积的氮化铝压电薄膜。
6. Structural and nanomechanical properties of BiFeO3 thin films deposited by radio frequency magnetron sputtering [O] . Sheng-Rui Jian, Huang-Wei Chang, Yu-Chin Tseng, 2013

机译：射频磁控溅射沉积BiFeO3薄膜的结构和纳米力学性能
7. Análisis estructural, superficial y tribológico de recubrimientos de nitruro de cromo (CrN) sintetizado por magnetrón sputtering reactivo DC = Structural, surface and tribological analyzed of CrN thin films by reactive magnetron sputtering DC [O] . Ruden Muñoz Alexander 2011

机译：反应溅射磁控管DC合成氮化铬（CrN）涂层的结构，表面和摩擦学分析DC =反应磁控溅射DC对CrN薄膜的结构，表面和摩擦学分析

Temperature effect on structural, mechanical properties and corrosion behaviour of CrN thin films deposited by magnetron sputtering

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