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Surface Morphology and Tribological Properties of Nanoscale (Ti, Al, Si, C)N Multilayer Coatings Deposited by Reactive Magnetron Sputtering

机译：由反应磁控溅射沉积的纳米级（Ti，Al，Si，C）N多层涂层的表面形态和摩擦学性质

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Mei Wang; Shojiro Miyake;
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1. Surface morphology and mechanical properties of nanoscale TiAlN/SiNx multilayer coating deposited by reactive magnetron sputtering [J] . Sakurai M, Toihara T, Wang M, Surface & Coatings Technology . 2008,第1a2期

机译：反应磁控溅射沉积纳米TiAlN / SiNx多层涂层的表面形貌和力学性能
2. Properties of TiAlCN/VCN Nanoscale Multilayer Coatings Deposited by Mixed High-Power Impulse Magnetron Sputtering (HiPIMS) and Unbalanced Magnetron Sputtering Processes—Impact of HiPIMS During Coating [J] . Kamath G., Ehiasarian A. P., Hovsepian P. E. Plasma Science, IEEE Transactions on . 2010,第11期

机译：混合高功率脉冲磁控溅射（HiPIMS）和不平衡磁控溅射工艺沉积的TiAlCN / VCN纳米多层涂层的性能-涂层期间HiPIMS的影响
3. A study on the tribological property of MoS2/Ti-MoS2/Si multilayer nanocomposite coating deposited by magnetron sputtering [J] . Kong Ning, Wei Boyu, Li Dongshan, RSC Advances . 2020,第16期

机译：磁控溅射沉积MOS2 / TI-MOS2 / SI多层纳米复合涂层的摩擦学性能研究
4. Tribological Evaluation of (Ti-Al)N Coatings Deposited by Reactive Magnetron Sputter Deposition [C] . K. Singh, P. K. Limaye, N.L.Soni, Indian Vacuum Society National Symposium on Vacuum Science amp; Technology and Vacuum Metallurgy(IVSNS 2003); 20031015-17; Mumbai(IN) . 2003

机译：磁控溅射沉积沉积（Ti-Al）N涂层的摩擦学评价
5. Structure, mechanical, tribological properties, and high temperature stability of titanium diboride/titanium carbide and titanium oxide/aluminum oxide multilayer coatings synthesized by magnetron sputtering. [D] . Lee, Kitty W. 2004

机译：通过磁控溅射合成的二硼化钛/碳化钛和氧化钛/氧化铝多层涂层的结构，机械，摩擦学性能和高温稳定性。
6. Surface Characteristics and Biological Evaluation of Si-DLC Coatings Fabricated Using Magnetron Sputtering Method on Ti6Al7Nb Substrate [O] . Dorota Bociaga, Anna Sobczyk-Guzenda, Piotr Komorowski, 2019

机译：Ti6Al7Nb衬底上磁控溅射制备的Si-DLC涂层的表面特性和生物学评价
7. A study on the tribological property of MoS2/Ti–MoS2/Si multilayer nanocomposite coating deposited by magnetron sputtering [O] . Ning Kong, Boyu Wei, Dongshan Li, 2020

机译：磁控溅射沉积MOS2 / TI-MOS2 / SI多层纳米复合涂层的摩擦学性能研究

Surface Morphology and Tribological Properties of Nanoscale (Ti, Al, Si, C)N Multilayer Coatings Deposited by Reactive Magnetron Sputtering

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