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Research on the Surface Evolution of Single Crystal Silicon Mirror Contaminated by Metallic Elements during Elastic Jet Polishing Techniques

机译：弹性射流抛光技术中金属元素污染的单晶硅镜表面演化研究

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Wanli Zhang; Feng Shi; Yifan Dai; Yaoyu Zhong; Ci Song; Ye Tian;
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6. Research on the Surface Evolution of Single Crystal Silicon Mirror Contaminated by Metallic Elements during Elastic Jet Polishing Techniques [O] . Wanli Zhang, Feng Shi, Yifan Dai, 2019

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Research on the Surface Evolution of Single Crystal Silicon Mirror Contaminated by Metallic Elements during Elastic Jet Polishing Techniques

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