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Thermal compensation of the measuring channel of the pressure sensor on the basis of semi-conductor integrated transducers

机译：基于半导体集成换能器的压力传感器测量通道的热补偿

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Andrey Borzov; Konstantin Likhoedenko; Viktor Cygankov; Andrey Vlasov; Yury Tinyakov; Konstantin Andreev; Tatiana Civinskaya;
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年度 2012
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1. Microscale thermal fluid transport process in a microchannel integrated with arrays of temperature and pressure sensors [J] . H. S. Ko, C. Gau Microfluidics and nanofluidics . 2011,第4期

机译：集成了温度和压力传感器阵列的微通道中的微型热流体传输过程
2. Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels [J] . Dijkstra M, de Boer MJ, Berenschot JW, Sensors and Actuators, A. Physical . 2008,第1期

机译：在半圆形表面通道上具有平面集成传感器结构的小型热流量传感器
3. Comparison of Apnea Detection Using Oronasal Thermal Airflow Sensor, Nasal Pressure Transducer, Respiratory Inductance Plethysmography and Tracheal Sound Sensor [J] . AbdelKebir Sabil PhD, Martin Glos PhD, Alexandra Günther MD, Journal of clinical sleep medicine: JCSM : official publication of the American Academy of Sleep Medicine . 2019,第02期

机译：使用口鼻热气流传感器，鼻压力传感器，呼吸电感描记法和气管声音传感器进行呼吸暂停检测的比较
4. An architecture for a 12 bits, low power integrated CMOS pressure sensor with thermal compensation [C] . F.Chavez, A.Olmos, R.Nogueira, IFIP TC10 WG10.5 International Conference on Very Large Scale Integration 26-30 August 1997, Gramado, RS, Brazil . 1997

机译：具有热补偿的12位低功耗集成CMOS压力传感器的架构
5. Design and fabrication of structured roughnesses in microchannels with integrated MEMS pressure sensors. [D] . Pasupuleti, Tushara. 2010

机译：具有集成MEMS压力传感器的微通道中结构化粗糙度的设计和制造。
6. Comparison of Apnea Detection Using Oronasal Thermal Airflow Sensor Nasal Pressure Transducer Respiratory Inductance Plethysmography and Tracheal Sound Sensor [O] . AbdelKebir Sabil, Martin Glos, Alexandra Günther, 2019

机译：使用口鼻热气流传感器鼻压力传感器呼吸电感描记法和气管声音传感器进行呼吸暂停检测的比较
7. Thermally isolated cells in designs of transducers of physical quantities made by an electrostatic anodic bonding of semi-conductor and dielectric elements [O] . Andrey Borzov, Konstantin Likhoedenko, Viktor Cygankov, 2012

机译：通过半导体和介电元件的静电阳极键合的物理量换能器中的热分离电池
8. Integrated CMOS circuits for piezoresistive pressure sensors with emphasis on thermal sensitivity shift compensation [R] . Gakkestad, J. 1993

机译：用于压阻式压力传感器的集成CmOs电路，重点是热灵敏度偏移补偿

Thermal compensation of the measuring channel of the pressure sensor on the basis of semi-conductor integrated transducers

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