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Scalable flexible chip-level parylene package for high lead count retinal prostheses

机译:可扩展的柔性芯片级聚对二甲烯包,用于高铅计数视网膜假体

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摘要

We present an innovative technology for the fabrication of a biocompatible parylene-based high lead count retinal prosthesis in which a prefabricated stand-aloneudapplication-specific integrated circuit (ASIC) is placed directly into the fabrication process of the other system components. The package is fabricated in such a way that the ASIC-to-electrode interconnects are patterned using standard photolithography. The density of interconnects is fully scalable to the limits of lithography. This packaging scheme also enables the simultaneous integration and interconnection of discrete components such as chip capacitors with the rest of the system. Electrical test results verify the efficacy of this cost-effective and high-yield packaging scheme, and pave the way for a monolithic implantable parylene-based intraocular system.
机译:我们提出了一种用于制造基于生物相容性的聚氨酯的高铅计数视网膜的创新技术,其中预制的独立 UdApplication特定的集成电路(ASIC)直接放入其他系统组件的制造过程中。包装以这样的方式制造,使得使用标准光刻图案化ASIC-靠电极互连。互连密度完全可扩展到光刻的极限。该封装方案还使得能够与系统的其余部分同时集成和互连,例如芯片电容器。电气测试结果验证了这种成本效益和高产包装方案的功效,并为整体植入聚对酰甲烯类的眼内系统铺平了道路。

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