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Design and Test of a Multi-Axis Acoustic-Levitation Device for Non-Contact Dust Removal from Precision Instruments

机译：从精密仪器的非接触式除尘器去除多轴声悬浮装置的设计和测试

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Yudi Niu; Yifan Pu; Xiaoqi Che; Mei Wang;
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Design and Test of a Multi-Axis Acoustic-Levitation Device for Non-Contact Dust Removal from Precision Instruments

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