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A fast high-precision six-degree-of-freedom relative position sensor

机译:快速高精度的六度自由度相对位置传感器

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摘要

Lasers are commonly used in high-precision measurement and profiling systems. Some laser measurement systems are based on interferometry principles, and others are based on active triangulation, depending on requirements of the application. This paper describes an active triangulation laser measurement system for a specific application wherein the relative position of two fixed, rigid mechanical components is to be measured dynamically with high precision in six degrees of freedom (DOF). Potential applications include optical systems with feedback to control for mechanical vibration, such as target acquisition devices with multiple focal planes. The method uses an array of several laser emitters mounted on one component. The lasers are directed at a reflective surface on the second component. The reflective surface consists of a piecewise-planar pattern such as a pyramid, or more generally a curved reflective surface such as a hyperbolic paraboloid. The reflected spots are sensed at 2-dimensional photodiode arrays on the emitter component. Changes in the relative position of the emitter component and reflective surface will shift the location of the reflected spots within photodiode arrays. Relative motion in any degree of freedom produces independent shifts in the reflected spot locations, allowing full six-DOF relative position determination between the two component positions. Response time of the sensor is limited by the read-out rate of the photodiode arrays. Algorithms are given for position determination with limits on uncertainty and sensitivity, based on laser and spot-sensor characteristics, and assuming regular surfaces. Additional uncertainty analysis is achievable for surface irregularities based on calibration data.
机译:激光器通常用于高精度测量和分析系统。一些激光测量系统基于干涉性原理,其他激光测量系统基于主动三角测量,具体取决于应用的要求。本文描述了一种用于特定应用的有源三角测量激光测量系统,其中两个固定的刚性机械部件的相对位置以六个自由度(DOF)高精度地以高精度地测量。潜在应用包括具有反馈的光学系统,用于控制机械振动,例如具有多个焦平面的目标采集装置。该方法使用安装在一个组件上的多个激光发射器阵列。激光器被引导在第二组分上的反射表面。反射表面由诸如金字塔的分段平面图案组成,或者更通常是弯曲的反射表面,例如双曲线抛物面。在发射器组件上以2维光电二极管阵列感测反射斑点。发射器组件和反射表面的相对位置的变化将使光电二极管阵列内的反射斑点的位置移位。在任何自由度中的相对运动在反射的点位置产生独立的偏移,允许在两个分量位置之间完整的六个相对位置确定。传感器的响应时间受到光电二极管阵列的读取速率的限制。基于激光和点传感器特性,给出了算法的位置测定,并基于激光和点传感器特性,并假设常规表面的不确定度和灵敏度。基于校准数据的表面违规是可实现的额外不确定性分析。

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