Possibility of Fabricating Anisotropic Conductive Film with a Line-and-Space-Like Pattern by Stick-Slip Accompanying Abrasion

摘要

The development of an anisotropic conductive film was attempted using original microfabrication (stick-slip (SS) processing) involving SS accompanying abrasion. During SS processing, the film surface was periodically scraped with a razor. For a metal-deposited polyethylene terephthalate (PET) film (metal/PET film), fine periodic structures (line and space (L/S)-like patterns) were formed on its surface because the metal layer was periodically scraped. This result proved that SS processing can be applied not only to polymers but also to metals. Moreover, the line interval of an SS-processed metal/PET film shortened as the contact force decreased, and the depth of the line became shallower in proportion to the line interval. In addition, SS-processed copper/PET (Cu/PET) film did not conduct electricity in the direction perpendicular to the Cu line; however, it conducted electricity in the direction parallel. Thus, this study shows the possibility of using SS processing for fabricating an anisotropic conductive film.