This paper proposes a reconfigurable sensor analog front-end using low-noise chopper-stabilized delta-sigma capacitance-to-digital converter (CDC) for capacitive microsensors. The proposed reconfigurable sensor analog front-end can drive both capacitive microsensors and voltage signals by direct conversion without a front-end amplifier. The reconfigurable scheme of the front-end can be implemented in various multi-mode applications, where it is equipped with a fully integrated temperature sensor. A chopper stabilization technique is implemented here to achieve a low-noise characteristic by reducing unexpected low-frequency noises such as offsets and flicker noise. The prototype chip of the proposed sensor analog front-end is fabricated by a standard 0.18-μm 1-poly-6-metal (1P6M) complementary metal-oxide-semiconductor (CMOS) process. It occupies a total active area of 5.37 mm2 and achieves an effective resolution of 16.3-bit. The total power consumption is 0.843 mW with a 1.8 V power supply.
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