首页> 外文OA文献 >A Contour-Lithography Method for Etching Nano-dimension and Large-dimension Openings

【2h】

A Contour-Lithography Method for Etching Nano-dimension and Large-dimension Openings

机译：一种蚀刻纳米尺寸和大维开口的轮廓光刻方法

代理获取

本网站仅为用户提供外文OA文献查询和代理获取服务，本网站没有原文。下单后我们将采用程序或人工为您竭诚获取高质量的原文，但由于OA文献来源多样且变更频繁，仍可能出现获取不到、文献不完整或与标题不符等情况，如果获取不到我们将提供退款服务。请知悉。

页面导航

著录项
引文网络
相似文献
相关主题

著录项

作者
Masanori Kubota; Yoshio Mita; Frédéric Marty; Tarik Bourouina; Tadashi Shibata;
展开▼
作者单位

展开▼
年度 2006
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. In vitro evaluation of microleakage under orthodontic brackets using two different laser etching, self etching and acid etching methods [J] . Nihal Hamamcı, Atılım Akkurt, Güvenç Başaran Lasers in Medical Science . 2010,第6期

机译：使用两种不同的激光蚀刻，自蚀刻和酸蚀刻方法对正畸支架下的微渗漏进行体外评估
2. Development of Si DRIE Process Allowing Simultaneous Etching from Narrow and Wide Mask Openings [J] . JUNJI OHARA, YUKIHIRO TAKEUCHI, KAZUO SATO Electronics and communications in Japan . 2011,第4期

机译：Si DRIE工艺的发展，可以同时从窄而宽的掩模开口进行蚀刻
3. Impact of recess-etching-assisting resist-openings on the shapes of gate grooves for short gate length InAlAs/InGaAs heterojunction FET's [J] . Xu D., Enoki T. IEEE Transactions on Electron Devices . 1999,第5期

机译：凹槽蚀刻辅助抗蚀剂开口对栅极长度较短的InAlAs / InGaAs异质结FET的栅极沟槽形状的影响
4. A contour-lithography method for rapid and precise deep-etched nano-MEMS structure fabrication [C] . Kubota, M., Mita, . 2005

机译：用于快速，精确的深蚀刻纳米MEMS结构制造的轮廓光刻方法
5. Fabrication of Tungsten Tips Suitable for Scanning Probe Microscopy by Electrochemical Etching Methods [D] . Basnet, Gobind 2013

机译：电化学刻蚀法制备适用于扫描探针显微镜的钨棒
6. In Vitro Evaluation of Microleakage Around Orthodontic Brackets Using Laser Etching and Acid Etching Methods [O] . Mohammad Hossein Toodehzaeim, Sogra Yassaei, Maryam Karandish, 2014

机译：使用激光蚀刻和酸蚀方法体外评估正畸支架周围的微渗漏
7. Experimental verification of the diffusion theory for wet isotropic etching of si via circular mask openings [O] . Svetovoy V., Berenschot J.W., Elwenspoek M.C. 2006

机译：通过圆形掩模开口对si的湿各向同性蚀刻的扩散理论的实验验证
8. Photoelastic Study of the Stresses near Openings in Pressure Vessels;Photoelastic Determination of the Stresses in Reinforced Openings in Pressure Vessels;Preliminary Evaluation of PVRC Photoelastic Test Data on Reinforced Openings in Pressure Vessels [R] . C E. Taylor, N. C. Lind, M. M. Leven 1966

机译：压力容器开口附近应力的光弹性研究;压力容器中加强开口应力的光弹性测定;压力容器中加强开口的pVRC光弹性试验数据的初步评价

A Contour-Lithography Method for Etching Nano-dimension and Large-dimension Openings

著录项

引文网络

相似文献

相关主题

期刊订阅