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Ecologically Friendly Metal-Silicide Semiconductor Reserch. Film Structure of .BETA.-FeSi2 Thin Films Prepared by Pulsed Laser Deposition Using an FeSi2 Alloy Target.

机译：生态友好友好的金属 - 硅化物半导体固定。用Fesi2合金靶通过脉冲激光沉积制备的.Beta.-Fesi2薄膜的薄膜结构。

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Tsuyoshi YOSHITAKE; Tatsuya NAGAMOTO; Gousuke SHIRAISHI; Kunihito NAGAYAMA;
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机译：生态友好友好的金属 - 硅化物半导体固定。激光烧蚀生长.β-Fesi2膜及其表征。

Ecologically Friendly Metal-Silicide Semiconductor Reserch. Film Structure of .BETA.-FeSi2 Thin Films Prepared by Pulsed Laser Deposition Using an FeSi2 Alloy Target.

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