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Cathodic arc evaporation of oxide coatings: investigation of the phase transformation at the target surface and deposition of Al and Hf oxides

机译：氧化物涂层的阴极电弧蒸发：对靶表面的相变和Al和HF氧化物沉积的研究

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Antonia Neels; Xavier Maeder; Max Döbeli; Alex Dommann; Hans Rudigier; Beno Widrig; Jürgen Ramm;
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年度 2015
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1. Investigation into phase transformations and structural and luminescent properties of multiphase coatings and aluminum oxide nanopowder prepared by evaporation with a pulsed electron beam [J] . Sokovnin S.Y., Ilves V.G. Nanotechnologies in Russia . 2013,第3a4期

机译：脉冲电子束蒸发法制备多相涂层和氧化铝纳米粉体的相变及结构与发光性能研究
2. Analysis of Local Regions near Interfaces in Nanostructured Multicomponent (Ti-Zr-Hf-V-Nb)N Coatings Produced by the Cathodic-Arc-Vapor-Deposition from an Arc of an Evaporating Cathode [J] . R. Krause-Rehberg, A. D. Pogrebnyak, V. N. Borisyuk The Physics of Metals and Metallography . 2013,第8期

机译：阴极电弧气相沉积法从蒸发阴极电弧产生的纳米结构多组分（Ti-Zr-Hf-V-Nb）N涂层界面附近的局部区域分析
3. On the phase formation of cathodic arc evaporated Al1-xCrx-based intermetallic coatings and substoichiometric oxides [J] . Dalbauer V, Ramm J., Kolozsvari S., Surface & Coatings Technology . 2018,第期

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4. Triggerless pulsed vacuum cathodic arc plasma deposition of thin titanium oxide coatings on PMP-foils as a functional coating for medical applications [C] . Kauffeldt M., Pflaum M., Schein J., 2012 25th International Symposium on Discharges and Electrical Insulation in Vacuum. . 2012

机译：无触发脉冲真空阴极电弧等离子体沉积在PMP箔上的氧化钛薄涂层上，作为医学应用的功能涂层
5. Nanocomposite Powder Synthesis and Cathode Coating Deposition for Intermediate Temperature Solid Oxide Fuel Cell. [D] . Shen, Yan. 2011

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6. Comparative Investigations of AlCrN Coatings Formed by Cathodic Arc Evaporation under Different Nitrogen Pressure or Arc Current [O] . Adam Gilewicz, Tatyana Kuznetsova, Sergei Aizikovich, 2021

机译：在不同氮气压力或电弧电流下通过阴极弧蒸发形成的Alcrn涂层的比较研究
7. Investigation into phase transformations and structural and luminescent properties of multiphase coatings and aluminum oxide nanopowder prepared by evaporation with a pulsed electron beam [O] . Sokovnin, S. Y., Il'ves, V. G. 2013

机译：脉冲电子束蒸发法制备多相涂层和氧化铝纳米粉体的相变及结构与发光性能研究

Cathodic arc evaporation of oxide coatings: investigation of the phase transformation at the target surface and deposition of Al and Hf oxides

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