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Demonstration of the Formation of Porous Silicon Films with Superior Properties Formed on Polished (100) Si with Screen-Printed Back Contacts

机译:用丝网印刷的背触点形成具有优异性能的多孔硅膜的形成。用丝网印刷的背触点

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摘要

udPorous silicon (PS) layers were formed by anodization on polished substrates of (1 0 0) Si at different current densities for a fixed anodization time of 30 mins. using different screenprinted/evaporated back contacts (Ag, Al) respectively. The PS films has been characterized by high resolution X-ray diffraction (HRXRD), photoluminescence (PL), Scanning Electron Microscopy (SEM) and Fourier Transform Infrared (FTIR) techniques respectively. Porosity and thickness of PS layers were estimated by gravimetric analysis. The properties of PS formed using screen-printed Ag & Al as the back contacts (SP-(Ag/Al)) was found to be superior as compared to the corresponding films with evaporated back contacts (EV-(Ag/Al)). The PS formed with screen-printed Ag & Al-back contacts shows better crystalline perfection, higher stability, higher PL efficiency and negligible PL decay compared to that formed with evaporated Ag & Al- as the back contact for the same current density and time of anodization.ud
机译:在30分钟的固定阳极氧化时间内,通过在不同电流密度下在(1 0 0)Si抛光基板上进行阳极氧化,形成多孔硅(PS)层。分别使用不同的丝网印刷/蒸发后触点(Ag,Al)。分别通过高分辨率X射线衍射(HRXRD),光致发光(PL),扫描电子显微镜(SEM)和傅立叶变换红外(FTIR)技术来表征PS膜。 PS层的孔隙率和厚度通过重量分析来估计。发现与丝网印刷的Ag和Al作为背触点(SP-(Ag / Al))形成的PS相比,具有蒸发后背触点(EV-(Ag / Al))的相应薄膜具有更好的性能。在相同的电流密度和相同的时间下,与以蒸镀的Ag和Al-作为背触点形成的PS相比,丝网印刷的Ag和Al背触点形成的PS表现出更好的晶体完美性,更高的稳定性,更高的PL效率和可忽略的PL衰减。阳极氧化

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