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Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode

机译:由单个电极致动的双稳态锁柄微开关的双向操作

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摘要

Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic elements and electrical and optical switches. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical beam by the same electrode, which was used for the snap-through switching of the device. The release of the mechanically-latched beam is achieved by pre-loading the structure using a rising voltage applied to the electrode, followed by a sudden decrease of the voltage. This abrupt removal of the loading results in a transient response and dynamic snap-back of the beam.
机译:弯曲的微机械梁探索多稳态行为,在基于机械的逻辑元件和电气和光学开关的潜在应用的通用平台。在这里,我们证明用相同的电极,其用于管理单元通过该装置的切换的双稳态,锁存,微机械梁的双向静电致动。机械闭锁束的释放是由预加载使用上升的电压的结构施加到电极,接着的电压的突然下降来实现的。这种突然去除在瞬态响应和动态加载的结果回跳的光束。

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