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Vertical GaN-on-GaN Schottky Diodes as α-Particle Radiation Sensors

机译:垂直GaN-On-GaN肖特基二极管作为α-粒子辐射传感器

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摘要

Among the different semiconductors, GaN provides advantages over Si, SiC and GaAs in radiation hardness, resulting in researchers exploring the development of GaN-based radiation sensors to be used in particle physics, astronomic and nuclear science applications. Several reports have demonstrated the usefulness of GaN as an α-particle detector. Work in developing GaN-based radiation sensors are still evolving and GaN sensors have successfully detected α-particles, neutrons, ultraviolet rays, x-rays, electrons and γ-rays. This review elaborates on the design of a good radiation detector along with the state-of-the-art α-particle detectors using GaN. Successful improvement in the growth of GaN drift layers (DL) with 2 order of magnitude lower in charge carrier density (CCD) (7.6 × 1014/cm3) on low threading dislocation density (3.1 × 106/cm2) hydride vapor phase epitaxy (HVPE) grown free-standing GaN substrate, which helped ~3 orders of magnitude lower reverse leakage current (IR) with 3-times increase of reverse breakdown voltages. The highest reverse breakdown voltage of −2400 V was also realized from Schottky barrier diodes (SBDs) on a free-standing GaN substrate with 30 μm DL. The formation of thick depletion width (DW) with low CCD resulted in improving high-energy (5.48 MeV) α-particle detection with the charge collection efficiency (CCE) of 62% even at lower bias voltages (−20 V). The detectors also detected 5.48 MeV α-particle with CCE of 100% from SBDs with 30-μm DL at −750 V.
机译:在这些不同的半导体,氮化镓提供了的Si,SiC和砷化镓优点在辐射硬度,导致研究者探索基于GaN的辐射传感器的发展中粒子物理,天文和核科学应用中使用。若干报告已经证明GaN的有用性作为α粒子检测器。在开发基于GaN的辐射传感器工作仍在发展和GaN传感器已经成功地检测到α粒子,中子,紫外线,X射线,电子和γ射线。上的良好的辐射检测器的设计本审查详解使用氮化镓的状态的最先进的α粒子探测器沿。在GaN漂移层(DL)与2个数量级的载流子密度降低(CCD)(7.6×1014 /厘米3)低的穿透位错密度(3.1×106 / cm2)的氢化物气相外延(HVPE生长成功改善)生长自支撑GaN衬底,这有助于〜3个数量级更低的反向漏电流(IR)与3-倍增加反向击穿电压。 -2400 V的最高反向击穿电压也从30微米DL自支撑GaN衬底上的肖特基势垒二极管(简称SBD)来实现。厚的耗尽层宽度(DW)与低CCD的形成导致了即使在较低的偏置电压(-20 V)改善高能量(5.48 MeV)的注入α-粒子检测用的62%的电荷收集效率(CCE)。检测器也检测到5.48 MeV的α粒子具有100%从30微米DL的SBD CCE在-750 V.

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