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Theoretical study for aerial image intensity in resist in high numerical aperture projection optics and experimental verification with one-dimensional patterns

机译：高值孔径投影光学器件抗蚀性的空中图像强度的理论研究及一维模式的实验验证

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Masato Shibuya; Akira Takada; Toshiharu Nakashima;
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4. Comparing the Experimental Resist Pattern Width with Aerial Image Intensity in Resist in High NA Projection Lens [C] . Masato Shibuya, Akira Takada, Toshiharu Nakashima Optical microlithography XXVIII . 2015

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Theoretical study for aerial image intensity in resist in high numerical aperture projection optics and experimental verification with one-dimensional patterns

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