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Effects of artificial pores and purity on the erosion behaviors of polycrystalline Al2O3 ceramics under fluorine plasma

机译：人工孔隙和纯度对氟血浆侵蚀性能的影响。氟血浆下多晶Al2O3陶瓷的侵蚀行为

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Dae-Min KIM; Kyeong-Beom KIM; So-Young YOON; Yoon-Suk OH; Hyung-Tae KIM; Sung-Min LEE;
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年度 2009
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Effects of artificial pores and purity on the erosion behaviors of polycrystalline Al2O3 ceramics under fluorine plasma

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