Growth of crystalline garnet mixed films, superlattices and multilayers for optical applications via shuttered Combinatorial Pulsed Laser Deposition

摘要

A range of high-quality crystalline garnet multilayer structures have been fabricated via multi-beam, multi-target PLD in conjunction with a system of mechanical shutters. Structures grown consisted of alternating Gd3Ga5O12 (GGG) and Gd3Sc2Ga3O12 (GSGG) layers on Y3Al5O12 (YAG) substrates, with both simple and chirped designs. Distinct layers are observed where layer thickness is around 2 nm or greater, although some layering may also be present at a sub-unit cell level. These structures demonstrate the viability of the shutter technique as a quick, simple fabrication method for a variety of optical multilayer structures.